Pro test rozlišení (Resolution test specimens)
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S1988A Low kV Sn-C test specimen on 10mm JEOL stub
EM-Tec Au on C resolution standard 2, 30-300nm, mounted on Ø12.7mm Zeiss pin stub
S1988B Low kV Sn-C test specimen on 15mm Topcon/ISI/ABT stub
EM-Tec Au on C resolution standard 2, 30-300nm, mounted on Ø12.2mm JEOL stub
S1988C Low kV Sn-C test specimen on 15mm HITACHI stub
EM-Tec Au on C resolution standard 2, 30-300nm, mounted on Ø15mm Hitachi stub
S1988D Low kV Sn-C test specimen on 12,5mm pin-stub, l=6mm
EM-Tec RXS-2WSi resolution and contrast test standard, fused W/Si on pin stub
S1988T Low kV Sn-C test specimen on thin (0,5mm) carbon disc ᴓ 6mm
EM-Tec RXS-TaSi resolution contrast test standard, fused Ta/Si on pin stub
S1988U Low kV Sn-C test specimen on carbon disc t=2mm, d=6mm
EM-Tec B100 Faraday cup for beam current measurements
S1937 Universal test specimen Sn particles 5 nm - 30µm on C, ᴓ 12,5mm pin-stub, l = 8mm
S1937E Universal test specimen Sn particles 5 nm - 30µm on C, ᴓ 12,5mm JEOL stub
S1937A Universal test specimen Sn particles 5 nm - 30µm on C, ᴓ 10mm JEOL stub
S1937B Universal test specimen Sn particles 5 nm - 30µm on C, ᴓ15mm Topcon/ISI/ABT stub
S1937C Universal test specimen Sn particles 5 nm - 30µm on C, ᴓ15mm HITACHI stub
S1937D Universal test specimen Sn particles 5 nm - 30µm on C, ᴓ12,5mm pin-stub, l = 6mm
S1937T Universal test specimen Sn particles 5 nm - 30µm on C, thin (0,5mm) carbon disc ᴓ 6mm
S1937U Universal test specimen Sn particles 5 nm - 30µm on C, thick (2mm) carbon disc ᴓ 6mm
AGS168ZVTSI Gold on 230-330µm silicon substrate. Particles 30-300nm
AGS168VTSI Gold on 230-330µm silicon substrate. Particles 5-150nm
S168SI Resolution Au-Si test specimen, silicon substrate 500um
S1969T High resolution Au-C test specimen on thin carbon disc ᴓ 6mm, t=0,5mm
AGS1969VTSI Gold on 230-330µm silicon substrate. Particles 3-50nm
AGS1937 Universal test specimen Sn particles 5 nm - 30µm on C, ᴓ 12,5mm pin-stub, l = 8mm
AGS1969SI Gold on 500µm silicon substrate. Particles 3-50nm
AGS1987VTSI Gold on 230-330µm silicon substrate. Particles 2-30nm
S1987SI Gold on 500µm silicon substrate. Particles 2-30nm
S1995A Critical Dimension calibration specimen, 10-5-2-1-0,5um, non-certified
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